Trichlorosilane is an inorganic compound with the formula HSiCl3. It is a colourless, volatile liquid. Purified trichlorosilane is the principal precursor to ultrapure silicon in the semiconductor industry. In water, it rapidly decomposes to produce a silicone polymer while giving off hydrochloric acid.

Because of its reactivity and . Find product specific information including CAS, MSDS, protocols and references. Health, Can cause serious or permanent injury. Red Flammability, Burns readily. Rapidly or completely vaporizes at atmospheric pressure and normal ambient temperature. Yellow Instability, Readily undergoes violent chemical changes at elevated temperatures and pressures.

CAUTIONARY RESPONSE INFORMATION. Irritating gas is produced on contact with water. Reacts violently with water. Avoid contact with liquid . Other means of identification.

Safety data sheet number. Recommended use of the chemical and restrictions on use. Industrial and professional use. This document is only controlled while on . The Specialty Gas Information Center at PraxairDirect.

Calculations have been carried out for the thermal decomposition of silane, chlorosilane, dichlorosilane, and trichlorosilane. Accurate energetics were obtained by . The famous high-tech industrial area of California, Silicon Valley, was named for the chemical element that has revolutionized the . Gas Phase Heat Capacity (Shomate Equation). The process of by-product formation during silicon film deposition using trichlorosilane gas was studied by two types of the in situ measurement techniques, such as the langasite crystal microbalance (LCM) and the quadrupole mass spectra (QMS) analyzer, installed at the exhaust of the chemical vapor . TCS samples were also analyzed. The ability to analyze TCS allows PV silicon manufacturers to check the TCS intermediate chemical for metallic impurities prior to the manufacture of PV silicon.

Trace Elemental Analysis of. Tokuyama manufactures and sells inorganic and organic chemicals, cement and building materials, electronic materials, advanced materials, plastic resins and films, medical-related products and other products.